環境浄化光触媒物質の結晶性薄膜成長とその有機分解能力に関する研究

概要

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Crystalline thin film growth of TiO_2 on a MgO(001) substrate has been attempted for the first time. The TiO_2 thin film was formed as follows. Ti wire was evaporated on a MgO(001) substrate by electron bombardment (EB) and then oxidization treatment was carried out. It was proven that the diffusion of the oxygen into the film is promoted as oxygen pressure, heating temperature and heating time increase. It was also confirmed by atomic force microscopy (AFM) that the film surface roughened by the oxidization. Reflection high-energy electron diffraction (RHEED) patterns taken from the oxidized TiO_2 film show that the one-dimensional crystalline domains extend in the [110] direction of the MgO(001) substrate and the (110) plane of rutile structure of TiO_2 grow parallel to the substrate surface. On the other hand, the resolving ability for organic compound was measured using TiO_2 film deposited on a glass by sputtering method. It was found that the resolving ability increases as the film thickens up to 380nm.
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