自作電子衝撃加熱装置による高融点チタン金属の真空蒸発

概要

論文の詳細を見る
A handmade electron bombardment system has been constructed to evaporate titanium metal with high melting temperature. The system is simply constructed from a spiral tungsten wire, a target of Ti rod and handmade power supply. Details of the electric power to melt the Ti rod target, the deposition rate on a substrate and the angular distribution of the evaporation direction are specified. Especially the shape of the head of the melted Ti rod is found to be very important to evaporate Ti atoms on a substrate effectively and uniformly.
日本真空協会の論文
2005-04-20