CVDダイヤモンド膜の研磨に関する研究(第3報) : 砥粒レス超音波研磨法による平面研磨の試み

概要

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"Non abrasive ultrasonic vibration polishing" had been proposed as a new polishing method of CVD diamond film and it was clarified that CVD diamond film can be polished smoothly and continuously by using pure titanium as tool material and spreading thin oil film on work surface. In order to apply this method to practical use such as low friction forming tool, polishing of plane surface with this method was attempted and following results are obtained. (1) Combination of tool feed direction and ultrasonic vibration direction influences the roughness of polished surface, (2) It is possible to polish plane area of CVD diamond film by overlapping linear polishing mark in perpendicular to tool feed direction, (3) CVD diamond film can be polished homogeneously by the combination of polishing direction, (4) Roughness of CVD diamond film polished by this method reaches 0.06μm to 0.08μm in Ra, 0.4μm to 0.5μm in Rz.
公益社団法人精密工学会の論文
2006-08-05