CVDダイヤモンド膜の研磨に関する研究(第2報) : 砥粒レス超音波研磨法による連続研磨の検討

概要

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The first report proposed "non abrasive ultrasonic vibration polishing" as a new method of polishing CVD diamond films and clarified that the titanium is the best tool material for polishing and thin oil film applied on working surface accelerates polishing speed by preventing adhesion of titanium to diamond. In order to apply this polishing method to practical use to finish coated diamond of cutting tools and forming dies, continuous polishing by this method is attempted under various conditions such as vibration amplitude, polishing load, tool feed, and overlapping frequency. As a result, it is obtained that (1) polishing action occurs remarkably by using titanium tool and applying thin oil film on working surface, (2) polishing action easily occurs under the condition where vibration amplitude is 7 to 11μ m_<p-p>, polishing load is 6 to 10N, tool feed is 2 to 6 mm/min, (3) enough smooth surface for cutting tools and forming dies can be practically realized by proper combination of vibration amplitude, polishing load, tool feed and overlapping frequency.
公益社団法人精密工学会の論文
2005-12-05