28GHzミリ波加熱法により焼結された窒化ケイ素セラミックスの材料物性解析(GS10 セラミックス・腐食)

概要

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We study the application of the millimeter wave heating method to the silicon nitride, which include Yb_2O_3 and Al_2O_3 as an additive. The sintered bodies showed excellent mechanical properties such as high Vickers hardness and fracture toughness at room and high temperatures, proving effectiveness of the millimeter wave heating method. It thinks because the millimeter wave heating method promotes crystallization of additive layer at the grain boundary. In this study, we calculated Young's modulus from the Surface wave velocity that measured by a scanning acoustic microscope, and compared with the result from three-point bending test. The acoustic microscope can measure a partial difference because it uses local information, and non-destruction is effective too. Moreover, were examined about the behavior under the high temperature condition by the TG analysis and the EDX analysis.
社団法人日本機械学会の論文
2004-07-20