606 大出力 28GHz ミリ波帯電磁波によるセラミックス焼結加工

概要

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New heating process based on high power 28GHz millimeter-wave radiation was reviewed by exemplifying the sintering of high pure alumina and Yb_2O_3-added aluminum nitride. It was indicated that high bending strength over 800MPa (50% higher value than that in conventional sintering method) was obtained in the AKP-20 alumina sintered with millimeter-wave heating. By applying millimeter-wave heating to Yb_2O_3-added aluminum nitride, the aluminum nitride with high thermal conductivity over 200W/(K・m) was also synthesized successfully at 1700℃ for 2-3hr in the reducing atmosphere. It is suggested that these successful results are attributed to so-called "microwave effect", which brings about enhanced mass transfer and electromagnetic force. Capabilities of millimeter-wave heating as the rapid and energy-saving processing for fabricating structural and functional materials are indicated.
一般社団法人日本機械学会の論文
2003-10-17