UHV-IMMA Development and Application to Hydrogen Detection
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1981-08-05
著者
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Satake Tohru
Ulvac Corporation:(present Address)department Of Nuclear Engineering Faculty Of Engineering Hokkaido
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Komiya Souji
Ulvac Corporation
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Tsukakoshi Osamu
Ulvac Corporation
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SHIMIZU Akira
ULVAC Corporation
関連論文
- A Molecular and Jon-Beam Epitaxy System for the Growth of III-V Compound Semiconductors Using a Mass-Separated, Low-Energy Group-V Jon Beam
- Molecular Beam Epitaxy of InP Using Low Energy P^+ Ion Beam
- A Simultaneous RHEED/AES Combined System
- Photo-Ionizalion Assisted Photo-CVD of Silicon Nitride Film by Microwave-Excited Deuterium Lamp
- A Simple Ion Energy Analyser Equipped with a Quadrupole Mass Spectrometer
- Observations of C_mF_n Radicals in Reactive Ion Beam Etching
- UHV-IMMA Development and Application to Hydrogen Detection
- Stabilization of the Discharge in Sputter-Ion Pumps