A Simple Ion Energy Analyser Equipped with a Quadrupole Mass Spectrometer

概要

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A cylindrical mirror analyser to pass tons in the energy range from 0 to 10 eV and at the angle of incidence ranging from 7°to 11°is designed for a co-axial ton energy analyser (IEA) suitable for combining with a quadrupole mass spectrometer (QMS) for secondary ion mass spectrometry (SIMS). A mass resolution of the combination for Cr^+ in SIMS measurement shows approximately that of the QMS in residual gas analysis. An Jon detector using the combination to measure the energy distribution of sputtered secondary ions is calibrated with a Na^+ Jon gun. The energy resolution and the accuracy are within 5 eV and 0.5 eV, in the Jon energy range of 5 to 60 eV respectively. Energy distributions of various metal ions including Na^+, K^+, Cr^+, Fe^+, Al^+, Cu^+, Ni^+, Ti^+, and Si^+ are measured under Xe ton bombardment of 0.5 to 2 keV. These are compared with energy distributions measured by other investigators.
社団法人応用物理学会の論文
1976-07-05