Y_1Ba_2Cu_3O_<7-δ> film Formation by an OM-CVD Method : Electrical Properties Condensed Matter
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概要
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In this letter, we report further studies on Y-Ba-Cu-O film formation by OM-CVD(Organometallic Chemical Vapor Deposition). Without postannealing, Y-Ba-Cu-O films grown on MgO(100) sigle-crystal substrates at a substrate temperature of 780℃ showed an onset temperature of 85 K and zero resistance at 65 K. X-ray diffraction (XRD) patterns showed well-ordered crystallinity for films grown at substrate temperatures higher than 700℃. XRD results indicated that Y-Ba-Cu-O films with (110) orientation were grown on SrTiO_3(110) single-crystal substrates.
- 社団法人応用物理学会の論文
- 1988-08-20
著者
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ABE Hitoshi
Research Laboratory, Oki Electric Industry Co., Ltd.
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NAKAMORI Tomohiro
Research Laboratory, Oki Electric Industry Co., Ltd.,
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Tsuruoka Taiji
Research And Development Group Oki Electric Industrial Co. Ltd.
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Tsuruoka Taiji
Research And Development Division Oki Electric Ind. Co. Ltd.
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Nakamori Tomohiro
Research And Development Group Oki Electric Industrial Co. Ltd.
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Abe Hitoshi
Research And Development Group Oki Electric Industrial Co. Ltd.
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Abe Hitoshi
Research & Development Group Oki Electric Industry Co. Ltd.
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- Authors' Reply
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