Oxidation of Si(100) Surfaces with Bi and Ag Overlayers in Ozone Atmosphere
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概要
- 論文の詳細を見る
Desorption of Bi and Ag deposited on Si(100) surfaces has been studied by Auger electron spectroscopy for heat treatment in distilled ozone atmospheres. Bi was desorbed from the Si surface at a substrate temperature T_s of 350〜450℃ and Ag was desorbed at T_s of 500〜570℃. The reflection high-energy electron diffraction (RHEED) patterns for Ag overlayers suggested that three-dimensional Ag(100) layers are formed on Si(100).
- 社団法人応用物理学会の論文
- 1991-12-15
著者
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ABE Hitoshi
Research Laboratory, Oki Electric Industry Co., Ltd.
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Ogihara Mitsuhiko
Research & Development Group, OKI Electric Industry Co., Ltd.
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Ogihara Mitsuhiko
Research Laboratory Oki Electric Industry Co. Lid.
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Yamada Tomoyuki
Research & Development Group Oki Electric Industry Co. Ltd.
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Yamada Tomoyuki
Research Laboratory Oki Electric Industry Co. Lid.
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Abe Hitoshi
Research Laboratory Oki Electric Industry Co. Lid.
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Abe Hitoshi
Research & Development Group Oki Electric Industry Co. Ltd.
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- Authors' Reply
- Oxidation of Si(100) Surfaces with Bi and Ag Overlayers
- Preparation of BiSrCaCuO Superconducting Thin Film by Molecular Beam Epitaxy with NO_2
- Oxidation of Si(100) Surfaces with Bi and Ag Overlayers in Ozone Atmosphere
- Y-Ba-Cu-O Film Growth by OMCVD Using N_2O