Evaluation of Self-Patterned PbZr_xTi_<1-x>O_3 Thin Film from Photosensitive Solution
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-09-30
著者
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SOYAMA Nobuyuki
Mitsubishi Materials Corporation, Development Section, Sanda Plant
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OGI Katsumi
Mitsubishi Materials Corporation, Central Research Institute
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Kageyama Kensuke
Mitsubishi Materials Corporation Central Research Institute
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Ogi K
Mitsubishi Materials Corporation Central Research Institute
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Atsuki T
Mitsubishi Materials Corporation Central Research Institute
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Uozumi Gakuji
Mitsubishi Materials Corporation, Central Research Institute
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Atsuki Tsutomu
Mitsubishi Materials Corporation, Central Research Institute
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Uchida Hiroto
Mitsubishi Materials Corporation, Central Research Institute
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Uozumi Gakuji
Mitsubishi Materials Corporation Central Research Institute
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Uchida Hiroto
Mitsubishi Materials Corporation Central Research Institute
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Soyama Nobuyuki
Mitsubishi Materials Corporation Development Section Sanda Plant
関連論文
- Low-Temperature Crystallization of Sol-Gel Derived Pb(Zr_,Ti_)O_3 Thin Films
- Preparation and Evaluation of Pb(Zr, Ti)O_3 Thin Films for Low Voltage Operation
- Evaluation of Pb(Zr, Ti)O_3 Films Derived from Propylene-Glycol-Based Sol-Gel Solutions
- New Low Temperature Processing of Sol-Gel SrBi_2Ta_2O_9 Thin Films
- Evaluation of Self-Patterned PbZr_xTi_O_3 Thin Film from Photosensitive Solution
- Preparation of Bi-Based Ferroelectric Thin Films by Sol-Gel Method
- Preparation of Dielectric Thin Films from Photosensitive Sol-Gel Solution ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Study on Pb-Based Ferroelectric Thin Films Prepared by Sol-Gel Method for Memory Application ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Surface Morphology of Lead-Based Thin Films and Their Properties ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Influence of Buffer Layers on Microstructural and Ferroelectric Characteristics of Sol-Gel Derived PbZr_xTiO_3 Thin Films ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Preparation of Pb(Zr,Ti)O_3 Films on Pi/Ti/Ta Electrodes by Sol-Get Process
- Micro-Patterning of PbZr_xTi_O_3 Thin Films Prepared by Photo Sensitive Sol-Get Solution