Transmission Electron Microscopic Studies of TiSi_2 Microstructures and the C49-C54 Phase Transformation in Narrow Lines
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-04-30
著者
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Hirashita Norio
Oki Electric Industry Co. Ltd. Vlsi Research & Development Center
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Hirashita Norio
Oki Electric Industry Co. Ltd. Vlsi R&d Laboratory
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Tai Kaori
Oki Electric Industry Co. Ltd. Lsi Production Division
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Onoda Hiroshi
Oki Electric Industry Co. Ltd. Lsi Production Division
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Okihara Masao
Oki Electric Industry Co. Ltd. Vlsi Research & Development Center
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Kageyama Makiko
Oki Electric Industry Co. Ltd. Lsi Production Division
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HARADA Yusuke
Oki Electric Industry Co., Ltd., LSI Production Division
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Harada Yusuke
Oki Electric Industry Co. Ltd. Lsi Production Division
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- Transmission Electron Microscopic Studies of TiSi_2 Microstructures and the C49-C54 Phase Transformation in Narrow Lines
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