Electrical Evaluation of Dry Etching Damage on the Side Wall of Mesa Structure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-02-28
著者
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Yamamoto N
Sharp Corp. Nara Jpn
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Kishi Kiyoshi
Department Of Applied Physics The Science University Of Tokyo
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KISHI Kenji
NTT Opto-electronics Laboratories
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YAMAMOTO Norio
NTT Opto-electronics Laboratories
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Kishi Kenji
Ntt Opto-elecronics Laborarories
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MAWATARI Hiroyasu
NTT Opto-electronics Laboratories
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