Fabrication of Nanometer-Order Dot Patterns by Lift-off Using a Fullerene-Incorporated Bilayer Resist System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Kuramochi Eiichi
Ntt Opto-electronics Laboratories
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TAMAMURA Toshiaki
NTT Opto-electronics Laboratories 3-1
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Tanaka H
Ntt Opto-electronics Laboratories
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ISHII Tetsuyoshi
NTT Opto-electronics Laboratories
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TANAKA Hirotaka
NTT Opto-electronics Laboratories
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Tamamura Toshiaki
Ntt Opto-electronics Laboratories
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