In Situ Mass and Photoemission Studies of Fluorinated Polyimide Films Irradiated with an Electron Beam
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概要
- 論文の詳細を見る
Fluorinated polyimide films were irradiated in an ultrahigh vacuum with arm electron beam. In situ mass analysis was carried out simultaneously and in situ photoemission studies were performed on surfaces modified by electron exposure at various electron beam energies and various sample currents. Based on the present data, the irradiation of electrons produces a fluorine-poor surface and an imide-ring opening, and the production rate was accelerated by raising the electron beam energy, An electron beam with low energy and low density is effective for changing the refractive index of the surface of fluorinated polyimide films with small strength change.
- 社団法人応用物理学会の論文
- 1996-04-15
著者
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Yamada-maruo Yasuko
Ntt Interdisciplinary Research Laboratories
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Tamamura Toshiaki
Ntt Opto-electronics Laboratories
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Sasaki Shigekuni
Ntt Interdisciplinary Research Laboratories
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