A Catalytic Effect of Hexafluorodisilane in Plasma Chemical Vapor Deposition of a-Si:H Films from Monosilane
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-06-20
著者
-
FUEKI Kazuo
Department of Industrial Chemistry, University of Tokyo
-
KOINUMA Hideomi
Department of Industrial Chemistry, University of Tokyo
-
Koinuma Hideomi
Department Of Applied Physics Graduate School Of Engineering Nagoya University
-
Koinuma Hideomi
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
-
MANAKO Takashi
Department of Industrial Chemistry, Faculty of Engineering, The University of Tokyo
-
Fueki Kazuo
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
-
Fueki Kazuo
Department Of Industrial Chemisrty Faculty Of Science And Technology Science University Of Tokyo
-
Manako Takashi
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
関連論文
- Ferromagnetism in Co-Doped TiO_2 Rutile Thin Films Grown by Laser Molecular Beam Epitaxy
- Structural and Optical Properties of ZnO Epitaxial Films Grown on Al_2O_3 (1120) Substrates by Metalorganic Chemical Vapor Deposition
- High Field Measurement of the Critical Field in (La_Sr_x)_2CuO_4 up to 40 T
- High-T_c Superconductivity of La-Ba(Sr)-Cu Oxides. IV : Critical Magnetic Fields
- High Pressure Study and the Critical Current of High T_c Superconductor (La_Sr_)_2CuO_
- Pressure Effect on the Lattice Constant and Compressibility of a Superconductor (La_Sr_)_2CuO_
- High T_c Superconductivity in Tm-Ba-Cu-O System
- Effect of Lanthanide Ion Substitutions for Lanthanum Sites on Superconductivity of (La_Sr_x)_2CuO_
- High T_c Superconductivity of (La_Sr_x)_2CuO_4 : (Effect of Substitution of Foreign Ions for Cu and La on Superconductivity
- Y-Ba-Co-O/Nb Tunnel Type Josephson Junctions
- Electrical Properties of La-Sr-Cu-O/Al Contact
- Temperature-Dependent Soft X-ray Photoemission and Absorption Studies of Charge Disproportionation in La_Sr_xFeO_3(Condensed Matter: Electronic Structure, Electrical, Magnetic and Optical Properties)
- Electron Tunneling Measurements of High-T_c Superconductor Bi-Sr-Ca-Cu-O by STM
- Specific Heat and Superconductivity of (La_Sr_)_2CuO_4
- Specific Heat and Superconductivity of Ba_2YCu_3O_y.
- Bulk Superconductivity of Y-Ba-Cu-O and Er-Ba-Cu-O
- Electric and Magnetic Properties of La_2CuO_4
- Superconducting Properties of (La_Sr_x)_2CuO_4
- Highly Coplanar Polythiophenes with -C≡CR Side Chains : Self-Assembly, Linear and Nonlinear Optical Properties, and Piezochromism
- NQR and NMR of ^La in Antifrromagnetic La_2CuO_
- X-Ray Photoelectron Spectroscopy Study of Hetero-Interface between Manganese Pnictide and Mn-Zn Ferrite
- Epitaxial Growth of InAs on Single-Crystalline Mn-Zn Ferrite Substrates
- Preparation of High-T_c Bi-Sr-Ca-Cu-O Superconducting Thin Films by AC Sputtering : Electrical Properties of Condensed Matter
- Some Problems in the Preparation of Superconducting Oxide Films on Ceramic Substrates
- Photochemical Approach to Analysis of Ferroelectric Transition in Ba_xSr_TiO_3 Epitaxial Films
- Photochemical Identification of a Possible Adsorbed Pentacene Molecule on the SrTiO_3(001)
- Preparation of Atomically Smooth TiO_2 Single Crystal Surfaces and Their Photochemical Property
- Molecular Alignments Studied by X-Ray Diffraction Analysis and Optical Properties of Vacuum-Deposited Thin Films of Thiophene-Pyridine Co-Oligomers
- The First Observation of ^1H-NMR Spectrum of Pentacene
- Quantitative Conductivity Mapping of SrTiO_3-LaAlO_3-LaTiO_3 Ternary Composition-Spread Thin Film by Scanning Microwave Microscope
- Direct Observation of Interlayer Josephson Vortices in Heavily Pb-Doped Bi_2Sr_2CaCu_2O_y by Scanning Superconducting Quantum Interference Device Microscopy
- Observation of Compositional Fluctuation by Scanning Superconducting Quantum Interference Device (SQUID) Microscope in Superconducting La_Sr_CuO_4
- Local Magnetic Properties of Underdoped La_Sr_χ CuO_4 Single Crystal Probed by Scanning Superconducting Quantum Interference Device Microscopy : Superconductors
- Pulsed Laser Epitaxy and Magnetic Properties of Single Phase Y-Type Magnetoplumbite Thin Films
- Ba-Y-Cu-O Thin Films Fabricated by Dip Coating Using Concentrated Mixed Alkoxide Solution : Electrical Properties of Condensed Matter
- Resistivity Anomaly Near Room Temperature of Y-Ba-Cu-O and Related Oxides as Created by the Surface Effect of Water
- Determination of Oxygen Nonstoichiometry in a High-T_c Superconductor Ba_2YCu_3O_
- High T_c Yb-Ba-Cu-O Thin Films Deposited on Sintered YSZ Substrates by Sputtering
- Superconductivity at 95 K in the New Yb-Ba-Cu Oxide System
- Chemical Interaction between Ba_2YCu_3O_ and Substrate Materials in the Solid State : Electrical Properties of Condensed Matter
- Superconductivity and Substrate Interaction of Screen-Printed Bi-Sr-Ca-Cu-O Films : Electrical Properties of Condensed Matter
- Thermal Expansion Coefficients of High-T_c Superconductors : Electrical Properties of Condensed Matter
- Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition
- Molecular layer-by-layer growth of C-60 thin films by continuous-wave infrared laser deposition
- X-Ray Magnetic Circular Dichroism and Structural Model for Co-Doped TiO_2 (Anatase) Thin Film (Condensed Matter : Structure, Mechanical and Thermal Properties)
- Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
- Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers
- Combinatorial Laser Molecular Beam Epitaxy (MBE) Growth of Mg-Zn-O Alloy for Band Gap Engineering
- Single Grain and Single Grain Boundary Resistance of Pentacene Thin Film Characterized by Nano-scale Electrode Array
- Fabrication of Liquid Crystal Polymer Films and Their Passivation Effect for Organic Devices
- An in-situ Fabrication and Characterization System Developed for High Performance Organic Semiconductor Devices
- Fabrication of Highly Oriented Rubrene Thin Films by the Use of Atomically Finished Substrate and Pentacene Buffer Layer
- Analysis of Time-Resolved Donor-Acceptor Photoluminescence of N-Doped ZnO
- Photo-Irresponsive Thin-Film Transistor with Mg_xZn_O Channel
- Shifting Donor-Acceptor Photoluminescence in N-doped ZnO(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
- Metallic LaTiO_3 / SrTiO_3 Superlattice Films on the SrTiO_3(100) Surface
- Magnetic Properties of Strain-Controlled SrRuO_3 Thin Films
- Combinatorial Synthesis of Transition Metal Oxide Superlattices (特集:表面科学研究のコンビナトリアルケミストリー)
- Magnetic and Transport Properties of Mn-Based Fractional-Layer Oxide Superlattices
- Rapid Synthesis and Scanning Probe Analysis of Ba_xSr_TiO_3 Composition Spread Films on a Temperature Gradient Si(100) Substrate : Electrical Properties of Condensed Matter
- Electronic State and Glow Discharge Decomposition of Tetramethyldisilane
- Periodic Boundary Quantum Chemical Study on ZnO Ultra-Violet Laser Emitting Materials
- A Catalytic Effect of Hexafluorodisilane in Plasma Chemical Vapor Deposition of a-Si:H Films from Monosilane
- Heteroepitaxy of Hexagonal ZnS Thin Films Directly on Si(111)
- Epitaxial Growth of the Wurtzite (112^^-0) AlN Thin Films on Si(100) with MnS Buffer Layer : Semiconductors
- Atomistic Crystal Growth Process of Metal Oxide Electronics Materials : Theoretical Simulation Studies
- Epitaxial Growth of III-V Semiconductors on Ferrite Substrates
- Effect of Heat Treatment on the Low-Temperature NQR Spectrum of ^La in Single Crystals and Polycrystals of the Antiferromagnetic La_2CuO_4
- Anomalous Temperature Dependence of ^La Nuclear Spin-Lattice Relaxation in La_2CuO_ and (La_Ca_)_2CuO_
- Effect of Residual Water on Superconductivity in (La_Sr_x)_2CuO_
- Fabrication of Planar Nano-gap Electrodes for Single Molecule Evaluation
- Plasma Spectra of New Superconductors (La_A_x)_2CuO_4
- Specific Heat and Superconductivity in (La_Ca_x)_2CuO_4
- High T_c Superconductivity in Screen Printed Yb-Ba-Cu-O Films
- Superconductivity Achieved at Over Liquid Nitrogen Temperature by (Mixed Rare Earths)-Ba-Cu Oxides
- Magnetic Susceptibility of High-T_c Superconducting Oxides (La, A)_2CuO_4 (A=Ba, Sr)
- Martensitic Transformation in La_Sr_xCoO_3
- Single-Crystal Growth of Perovskite-Type La_Sr_xMO_3 (M=Fe, Co) Solid Solutions
- Single Crystal Growth of La_Sr_xCoO_4 (x=0.0, 0.5, 1.0 and 1.5)
- High T_c Thin Films of (La_M_x)_yCuO_ (M=Sr, Ba, Ca) Prepared by Sputtering
- Compositional and Structural Analyses for Optimizing the Preparation Conditions of Superconducting (La_Sr_x)_yCuO_ Films by Sputtering
- Dependence of J_c on the Composition of Superconductor Films of the Bi System
- Electrical Properties of Single Crystalline TiO_2 Doped with Metallic Sodium Vapor : Semiconductors and Semiconductor Devices
- Defect Thermodynamics of (La_Sr_x)_2CuO_ Superconducting Oxide
- Preparation of (La_Sr_x)_2CuO_ Superconducting Films by Screen Printing Method
- Defect Thermodynamics of Nd_Ce_xCuO_
- Melting Point of Superconducting Oxides as a Function of Oxygen Partial Pressure
- High-T_c Superconductivity and Diamagnetism of Y-Ba-Cu Oxides
- The high-temperature reaction of iron with sulfur dioxide.
- Thermodynamic and X-Ray Studies of Solid Solutions of Silver Bromide and Lithium Bromide
- An EMF Study of Certain Orthoferrites: YFeO3, GdFeO3 and SmFeO3
- Studies on electrode processes of stabilized zirconia cell system by complex impedance method.
- The determination of the chemical diffusion coefficients for AgBr and .ALPHA.-AgI by means of an improved d.c. polarization cell.
- Kinetics of the Reaction at the Silver–Silver Sulfide Interface
- Kinetics of the reaction at the silver sulfide-liquid sulfur interface.
- The determination of the chemical diffusion coefficient of n-type AgBr by means of a d.c. polarization cell.
- The thermodynamics of nonstoichiometric Pr1-yGdyO1.5+.DELTA..
- Determination of the solubility of oxygen in copper by the coulometric method.
- An Investigation of the Hebb-Wagner's d-c Polarization Technique I. Steady-state Chemical Potential Profiles in Solid Electrolytes
- Defect chemistry of barium monoferrite, BaFe2O4-.DELTA..