Change of Magnetization Characteristics on Bias Modulated Co-CoO Layered Film Using Reactive Sputtering

概要

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The magnetic interaction between Co and CoO is thought to influence the magnetic properties of reactive sputtered Co-O perpendicular magnetization films. Co-CoO multi-layered films were prepared using a conventional rf sputtering method by modulating the substrate bias, and the effect of the interaction between Co and CoO on magnetic properties of films was investigated. For the Co-CoO multi-layered films prepared by bias modulation, the perpendicular magnetic anisotropy was induced by shortening the modulation period. For layered films with a short period, the saturation magnetization decreases and the coerciving increases with the decreasing ratio of Co layer thickness to CoO layer thickness. Bias modulated Co-CoO films with layered structure show the perpendicular magnetization when the modulation period is less than 50 Å.
社団法人応用物理学会の論文
1987-01-20