Selective Dissociative Ionization of SiH_4, Si_2H_6 and Si_3H_8 by Electron Impact in Supersonic Free Jets
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-06-15
著者
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Fons P
Optoelectronic Materials And Devices Group Photonics Research Institute National Institute Of Advanc
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Abe Hiroshi
Institute for Materials Research, Tohoku University
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Fons P
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Fons Paul
Institute Of Applied Physics University Of Tsukuba
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MOTOOKA Teruaki
Institute of Applied Physics, University of Tsukuba
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TOKUYAMA Takashi
Institute of Applied Physics, University of Tsukuba
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Motooka T
Kyushu Univ. Fukuoka Jpn
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Tokuyama T
Institute Of Applied Physics University Of Tsukuba
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Abe Hiroshi
Institute Of Applied Physics University Of Tsukuba
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Abe Hiroshi
Institute of Applied Physics, University of Tsukuba
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