Dependence of Minority-Carrier Recombination Lifetime on Surface Microroughness in Silicon Wafers

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概要

• 論文の詳細を見る

• The influence of silicon surface microroughness on the minority-carrier recombination life-time has been studied with a laser/microwave photoconductance technique. By means of an algorithm for separating the surface and bulk components, it has been shown that the microroughness considerably affects the surface recombination velocity, in turn the lifetime, of silicon wafers at elevated temperatures. It is found that the smoother results in the higher lifetime.

• 社団法人応用物理学会の論文
• 1993-12-15

著者

• SHIMURA Fumio

  Department of Food & Nutrition, Jumonji University

• Daio Hiroshi

  Department Of Materials Science And Engineering North Carolina State University

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