Synthesis of A15 Nb-Si Films on Si-Precoated Substrate Using Dual-Target Sputtering
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概要
- 論文の詳細を見る
- 1986-07-20
著者
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NAKAMURA Kiko
NTT Electrical Communication Laboratories
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TAKEI Koji
NTT Electrical Communication Laboratories
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MAEDA Yasushi
NTT Electrical Communication Laboratories
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Maeda Y
Deparment Of Information And Control Engineering Toyota Technological Institute
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Maeda Y
Center For Microelectronic Systems Kyushu Institute Of Technology
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Maeda Y
Sony Corp. Tokyo Jpn
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Takei K
Pioneer Corp. Saitama Jpn
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