Tin Oxide Films by Chemical Vapor Deposition Using a Monobutyltin Trichloride Source : The Effect of H_2O on Deposition Bahavior and Electrical Properties

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-02-15

著者

• Hong K

  Seoul National Univ. Seoul Kor

• HONG Kug

  School of Materials Science & Engineering, College of Engineering, Seoul National University

• Lee S

  Kangwon National Univ. Kangwon‐do Kor

• Lee S‐m

  Seoul National Univ. Seoul Kor

• YOUN Hyuk-Joon

  School of Materials Science and Engineering, College of Engineering, Seoul National University

• Youn Hyuk-joon

  School Of Materials Science And Engineering College Of Engineering Seoul National University

• Youn Hyuk-joon

  School Of Materials Science And Engineering Seoul National University

• LEE Si-Moo

  School of Materials Science and Engineering, Seoul National University

• KIM Dong-Lae

  Technical Institute of Glass Manufacture, Keumkang Chemical Co., Ltd.

• Hong Kug

  School Of Material Sciences & Engineering Seoul National University

• Lee Si-moo

  School Of Materials Science And Engineering Seoul National University

• Kim Dong-lae

  Technical Institute Of Glass Manufacture Keumkang Chemical Co. Ltd.

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