Ultrasonic Linear Motor using L1–B4 Mode and its Analysis

概要

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This paper presents the results of a transient dynamic analyses and experiments on an ultrasonic linear motor (USLM). For a simulation of dynamics of the ultrasonic linear motor, an analytic method has been used. Numerical analysis was performed to determine the precise characteristics of the ultrasonic linear motor. The contact between slider and stator has hindered the transient dynamic finite element method (FEM) analysis of ultrasonic motors. In this study, the problem was solved using the reaction force. Transforming the applied electric field to the mechanical reaction force, transient dynamic analysis was performed in contact condition. The resonance frequency and the velocity of the linear motor were determined to be 35.6 kHz and 34 cm/s respectively from FEM analysis. And the equilibration time when the vibration and velocity of motor reach the steady states can be calculated. The validity of analysis results including eigen frequencies and a velocity of a motor, was confirmed by comparison with steady state analysis and experiments.
公益社団法人応用物理学会の論文
2005-01-15