Characteristics of Double Probe in Negative Ion-Containing Plasmas
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概要
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Analysis of current-voltage characteristics of a generalized asymmetric double probe is made for plasmas containing negative ions. Characteristics are insensitive to negative ions up to a critical negative ion density ratio (>0.9), and tend to obey the tanh formula below this ratio. This critical value increases with higher negative ion mass. Applicability to negative-ion diagnostics is also considered.
- 社団法人応用物理学会の論文
- 1988-12-20
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