Production of Electron-Free Plasma by Using a Magnetic Filter in Radio Frequency Discharge
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概要
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A source plasma is generated in a multipole-type device in oxygen by a radio frequency discharge at 13.56 MHz. A SmCo magnet array is mounted between source and target plasma sections as a magnetic filter. In the target section, almost electron-free plasma is obtained. The device can be operated in the pressure range of 10^<-3> to 10^<-1> Torr. The plasma densities in source and target plasmas are 10^9-10^<10> cm^<-3> and 10^8-10^9 cm^<-3>, respectively.
- 社団法人応用物理学会の論文
- 1991-10-15
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