Electron Energy Distribution in Multicusp-Type ECR Plasma

概要

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A multicusp-type electron cyclotron resonance (ECR) plasma device is built with SmCo magnets and 2.45 GHz, TE11 circular-mode microwaves. DC bias can be superimposed between anode bars and a grid placed near the end surface to control the plasma. Electron energy distribution is measured by a Langmuir probe and a gridded analyzer. The plasma density is about $2\times 10^{10}$ cm-3 and $4\times 10^{10}$ cm-3 at the center and the cusp region, respectively. The equivalent electron temperature, 2/3 times the mean energy, is 4 eV and 15 eV at respective regions. The high-energy tail extends to above 100eV.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
1989-11-20