YBa_2Cu_3O_x Thin Films with Yttria Stabilized Zirconia Butler Layer on Metal Substrate by Liquid Source Chemical Vapor Deposition Using Tetrahydrofuran Solution of β-Diketonates

概要

論文の詳細を見る
Textured YBa_2Cu_3O_x (YBCO) thin films with c-axis orientation on Ni-based metal substrate with yttria stabilized zirconia (YSZ) and Pt buffer layers were formed by liquid source chemical vapor deposition (LS-CVD) using tetrahydrofuran (THF) solution of β-diketonates. The YSZ buffer layer with a-axis orientation was formed by the similar LS-CVD on prebuffer layers of amorphous YSZ and Pt deposited by sputtering at room temperature. The CVD-YSZ buffer layer was mechanically polished before the deposition of YBCO. By transmission electron microscopy (TEM) and analytical electron microscopy (AEM), it was ascertained that YBCO and YSZ layers had platelike and column-shaped grains, respectively. An intermetallic compound of the Pt-Ni-Cr system was produced in the vicinity between the YSZ layer and metal substrate. The critical temperature (T_c) of 91 K and the transport critical current densities (J_c) of 1.4×10^5 A/cm^2 at 77 K, zero field, and 2.0×10^4 A/cm^2 at 1.5 T were achieved.
社団法人応用物理学会の論文
1995-05-15