Quartz Temperature Sensors of Torsional Vibration Formed from Doubly Rotated Plates
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概要
- 論文の詳細を見る
This paper describes quartz temperature sensors using the torsional vibration mode and formed from doubly rotated plates. An objective of this paper is to clarify theoretically and experimentally their frequency temperature behavior. Another objective is to realize a miniaturized quartz temperature sensor with easy processing, low frequency, small series resistance R_1 and sufficient temperature sensitivity. The analysis results for frequency temperature behavior are then compared with the measured data. The theoretical and experimental results are in good agreement. In addition, a miniaturized quartz temperature sensor that is easily formed by an etching process is found to be successfully obtained with a frequency of 413 kHz, series resistance R_1 of 4.2 kΩ and temperature sensitivity of 23.7 ppm/℃ in the calculation and 25.4 ppm/℃ in the experiments.
- 社団法人応用物理学会の論文
- 1994-05-30
著者
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Shimizu Yasutaka
Tokyo Institute Of Technology
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NAKAZATO Mitsuhiro
Seiko Electronic Components Ltd.
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Kawashima Hirofumi
Seiko Electronic Components Lrd.
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Kawashima Hirofumi
Seiko Electronic Components Co. Ltd.
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