Quartz Microsensors for Monitoring Thin Film Thickness
スポンサーリンク
概要
- 論文の詳細を見る
This paper describes a quartz microsensor for monitoring thin film thickness. A microresonator of tuning fork-type with stepped vibration bars vibrating in torsion which can be approximately regarded as "clamped-free bar" is very available for monitoring thin film thickness because it has excellent frequency temperature behavior over a wide temperature range of room temperature to high one of about 200℃. In this paper, a relationship of resonant frequency to thin film thickness of Au and Al is theoretically and experimentally clarified for the microresonator, so that the frequency deviation is proportional to the film thickness deposited on the top of the tuning arms, and the calculated values are in good agreement with the measured ones. This microresonator is, therefore, very available for monitoring thin film thickness.
- 社団法人応用物理学会の論文
- 1996-05-30
著者
関連論文
- TT-Cut Torsional Quartz Crystal Resonators of Free-Free Bar-Type
- Quartz Microsensors for Monitoring Thin Film Thickness
- A Method of Adjusting Frequency Temperature Coefficients and Resonant Frequency for NS-GT Cut Quartz Crystal Resonators
- Timoshenko's Shear Coefficient for Transverse Vibrations of Trigonal Crystals of Rectangular Cross Section
- Dependence of Load Capacitance for a Coupling Quartz Crystal Resonator : SAW and BAW Materials, Devices and Theories
- A Vibration Analysis of Torsional Quartz Crystal Resonators Taking Account of Lateral Motion
- An Analysis of Spurious Vibrations for a New Shape Length Extensional Mode Quartz Crystal Resonator : Ultrasonic Transduction
- An Analysis of Stiffened Vibration for Torsional Crystal Resonators and Its Application to Quartz Crystal
- An Analysis of Torsional Mode Quartz Crystal Resonators with Galerkin's Method and Its Application to Research of New Cuts
- Overtone Lame-Mode Quartz Crystal Resonators Fabricated by an Etching Process
- New Shape Flexural Mode Quartz Crystal Resonator with Suppression of Energy Leakage by Vibration : Piezoelectric Vibrators and Devices
- A Sensor for Thin Film Thickness Monitor Using Torsional Quartz Crystal Resonators of Stepped, Free-Free Bar-Type
- Vibration Analysis of Coupled Flexural Torsional Mode Tuning Fork Type Quartz Crystal Resonator : Part (3) : Ultrasonic Transduction
- Quartz Temperature Sensors of Torsional Vibration Formed from Doubly Rotated Plates
- A Miniaturized Face Shear Mode Quartz Crystal Resonator : SAW and Communication Device