Overtone Lame-Mode Quartz Crystal Resonators Fabricated by an Etching Process

概要

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A quartz crystal resonator of Lame-mode vibrating in overtone (m = 3, n = 1) is very available for realization of a frequency over approximately 3 MHz because its frequency constant has a value of 360 kHz・cm at a cut angle φ = 36° and its frequency is dependent upon contour dimensions of the resonator. In this paper, relationships of frequency constant (ƒ・2z_0), frequency temperature coefficients α, β and a capacitance ratio r versus cut angle φ, and also frequency temperature behavior are, respectively, shown theoretically and experimentally. The calculated values agree well with the measured ones, and a quartz crystal resonator of Lame-mode vibrating in overtone (m = 3, n = 1) is successfully obtained with a zero temperature coefficient at room temperature, a small series resistance R_1 and a small capacitance ratio r.
社団法人応用物理学会の論文
1996-05-30