Ionized Cluster Beam Deposition Source for Aluminum and Aluminum Oxide Formation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-11-30
著者
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Ito Hiroki
Development Department Mitsubishi Electric Corporation
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Ito H
Department Of Energy And Environmental Science Graduate School Of Utsunomiya University
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KAJITA Naoyuki
Development Department, Mitsubishi Electric Corporation
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YAMAJI Shigeru
Development Department, Mitsubishi Electric Corporation
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MINOWA Yoshibumi
Development Department, Mitsubishi Electric Corporation
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Yamaji Shunji
Development Department Mitsubishi Electric Corporation
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Kajita N
Mitsubishi Electric Corp. Hyogo
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Minowa Y
Mitsubishi Electric Corp. Hyogo Jpn
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