Medium-Energy Ion Scattering Analysis with 50 keV He^+ by the Time-of-Flight Technique
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概要
- 論文の詳細を見る
A newly developed time-of-flight spectrometer for medium-energy ion scattering is presented. The system mainly consists of a 60 kV duoplasmatron ion source, a beam chopper and an annular microchannel plate. Time and depth resolutions are found to be 7.8 ns and 2.9 nm, respectively. The probing depth is limited by the multiple scattering effect and is estimated experimentally to be up to ∼20 nm for Au.
- 社団法人応用物理学会の論文
- 1992-12-15
著者
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KONOMI Ichiro
TOYOTA Central Research and Development Laboratories Inc.
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Konomi Ichiro
Toyota Central R&d Labs. Inc.
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HIOKI Tatsumi
Toyota Central aresearchand Development Inc.
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Hioki Tatsumi
Toyota Central Research And Development Laboratories Inc.
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Kawano Akira
Toyota Central Research And Development Laboratories Inc.
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