Linear Response Theory for Velocity Distribution Measurement of Sputtered Neutral Particles by Means of Multiphoton Resonance Ionization Spectroscopy
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概要
- 論文の詳細を見る
A measurement system for the velocity distribution of sputtered neutral particles by means of multiphoton resonance ionization spectroscopy (MPRIS) combined with the time-of-flight (TOF) technique was formulated using the simple linear response theory in matrix form. The relationship between each parameter for the measurement and the observed TOF spectrum could be indicated visibly in the present form. It was demonstrated that the optimum condition for the velocity distribution measurement can be derived easily with the present method. It was also demonstrated that the velocity distribution measured is seriously affected by the pulse shape of the primary ion beam.
- 社団法人応用物理学会の論文
- 1992-05-15
著者
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Inoue Masahiko
Department Of Applied Physics Faculty Of Engineering Osaka University
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Inoue Masahiko
Department Of Crystalline Materials Science School Of Engineering Nagoya University
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