Epitaxial and Amorphous-Crystalline Phase Transition Growth of Evaporated Te Films
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概要
- 論文の詳細を見る
The structure and growth behavior of Te films evaporated on mica and glass substrate have been investigated as a function of substrate temperature. A marked difference in grain structure, grain size, surface smoothness, effect of deposition rate and also effect of artificially predeposited metal nucleation centers was observed between Te films deposited above and below 50℃. From optical microscopic observation and from the measurement of electric conductivity changes in Te films during and after deposition, it is shown that at temperatures above 50℃ the Te vapor condenses in a crystalline film epitaxially when a mica substrate is used, while at temperatures below 50℃ it condenses in a form of amorphous film and then a sudden change from amorphous to crystalline phase takes place a short time after the deposition is completed.
- 社団法人応用物理学会の論文
- 1979-03-05
著者
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KUMAGAI Yasuji
Department of Electrical and Information Engineering, Faculty of Engineering, Yamagata University
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Kumagai Yasuji
Department Of Electronic Engineering Faculty Of Engineering Yamagata University
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Okuyama Katsuro
Department Of Electronic Engineering Faculty Of Engineering Yamagata University
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Okuyama Katsuro
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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Chiba Muneo
Department Of Electronic Engineering Faculty Of Engineering Yamagata University
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