Analysis of the β-Conductive Signal Excited with a Pulsed Electron Beam

スポンサーリンク

概要

• 論文の詳細を見る

• Dependences of the phase and the absolute value of the β-conductive signal upon the frequency of an exciting electron beam and the surface recombination velocity on semiconductors are reported. The penetration depth of the impinging electron beam into the surface of the specimen is assumed to be much shorter than the diffusion length for minority carriers, while the dimensions of the semiconductor specimen bar are assumed to be fairly large compared to the diffusion length. The absolute value of the β-condcutive signal excited with a pulsed electron beam decreases monotonously when the angular frequency ω of the beam exceeds the reciprocal of the lifetime τ_p for minority carriers. The delaying phase angle referred to the beam frequency increases from 0 to 90 degrees as ωτ_p increases. The absolute value and the phase angle also depend upon the surface recombination velocity s_f at the beam-irradiated point of the bar. Possible applications of the results to experiments are suggested.

• 社団法人応用物理学会の論文
• 1972-09-05

著者

• Munakata Chusuke

  Department Of Electrical Engineering And Computer Sciences University Of California

関連論文

• Frequency Dependence of the Diffusion Length for Excess Minority Carriers Generated with a Pulsed Electron Beam
• Charge Storage Effect in the Microwave Detected Photoconductive Decay Method
• Effect of the Surface Recombination Velocity on the β-Conductive Signal
• Analysis of the β-Conductive Signal Excited with a Pulsed Electron Beam
• Separation between Surface and Volume Decay Times of Photoconductivity in p-Type Silicon Wafers
• Density Distribution Profiles of Excess Minority Carriers Injected with 904-nm-Wavelength Laser Pulse into 400-μm-Thick Silicon Wafer
• Lateral Size Effect in the Lifetime Measurement by Frequency-Dependent Surface Photovoltage Technique
• Charge Storage Effect in the Microwave Detected Photoconductive Decay Method
• Estimation of Volume Lifetimes in Small Square Pillars of Silicon using Empirical Formulae

スポンサーリンク