4.分子動力学法によるエッチング表面反応シミュレーション(プラズマエッチングのシミュレーション)
スポンサーリンク
概要
- 論文の詳細を見る
Plasma etching is a desorption process of surface materials caused by physical/chemical interactions between the surface and reactive species emitted from the plasma. In general such surface chemical reactions differ significantly from those in thermodynamical equilibrium due to a significant amount of kinetic energy supplied by ion bombardment. Recently molecular dynamics(MD)simulations have been used to elucidate such surface reaction mechanisms. This article reviews the present status of MD simulation study of plasma-surface interactions, focusing on Si etching processes used in semiconductor manufacturing.
- 社団法人プラズマ・核融合学会の論文
- 2001-12-25
著者
-
浜口 智志
大阪大学大学院工学研究科原子分子イオン制御理工学センター
-
浜口 智志
京都大学大学院エネルギー科学研究科
-
浜口 智志
京都大学エネルギー科学研究科
-
Hamaguchi Satoshi
Niigata Univ. Niigata Jpn
関連論文
- フリーマン型イオン源におけるメチルシランのフラグメントイオンとタングステンワイヤ表面状態
- 第3回ITER国際夏の学校(IISS-2009)
- 分子動力学シミュレーションによる硬質炭素膜形成メカニズムの解析
- 3.ドライエッチング表面解析 : 原子スケールアプローチ(ドライエッチングの科学と技術の新局面)
- CF_3^+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果
- 小型プラズマ発生装置を用いた殺菌 (特集 滅菌・不活性化技術の最前線)
- 冷たいプラズマによる液中化学反応--重合から殺菌まで
- 低周波大気圧マイクロプラズマジェット
- 低エネルギー質量分離イオンビーム照射装置を用いたSiO_2/Si基板へのインジウムイオン注入
- 光照射を重畳したCF_3イオンビームによるSiO_2エッチング率の測定
- ドライエッチング表面反応シミュレーション
- 低エネルギー質量分離イオンビーム照射装置を用いたネオンによる金のスパッタ率の測定
- 低エネルギー質量分離イオンビーム照射装置を用いた金の堆積率の測定
- プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会報告
- 1. はじめに(プラズマ応用技術におけるシミュレーション研究)
- 23aYF-14 低次元モデルによるイオン温度勾配 (ITG) 駆動乱流の輸送過程
- 27aA29P 高ベータトカマクプラズマにおけるm/n=1/1、2/1テアリングモードの非線形カップリングに関するシミュレーション研究(トカマク)
- 5.強結合ダストプラズマ(ダストプラズマの基礎物理とその広がり)
- 4.分子動力学法によるエッチング表面反応シミュレーション(プラズマエッチングのシミュレーション)
- 3 エッチングプロセスにおけるプラズマ表面相互作用(シンポジウムV : プラズマ応用の課題)
- 18aRB-4 抵抗性インターチェンジモードによる密度分布の局所平坦化に対するポロイダルシアー流の効果
- 液体接触プラズマによるフリーラジカルを用いた液中殺菌
- 大気圧低温プラズマによる液中フリーラジカル生成
- 18aRB-1 ドリフト拡散モデルと有限要素法に基づく二次元軸対称アルゴンプラズマのシミュレーション
- 17pRB-5 トカマクにおける高ηバルーニングモードに対するトロイダル流の効果 (II)
- 17aRA-6 非線形抵抗性壁モードのモデリング
- プラズマプロセスにおける表面反応数値シミュレーション
- 低周波大気圧マイクロプラズマジェットの放電メカニズム
- Plasma Current Effects on Unstable Resistive Drift-Alfven Modes in a Magnetized Cylindrical Plasma
- 28aXG-4 分子動力学シミュレーションをもちいた強結合湯川系での粘性係数の計算
- 22pXG-13 負磁気シアートカマクにおける非線形ダブルテアリングモード
- 22pXG-4 イオン温度勾配(ITG)モードの少数自由度モデル
- 25pYG-10 円柱プラズマ中の抵抗性ドリフト-アルフベン波の線形解析
- Induction of Female-to-Male Sex Reversal by High Temperature Treatment in Medaka, Oryzias latipes(SHORT COMMUNICATION,Developmental Biology)
- POSITIONAL CLONING OF THE SEX-DETERMINING GENE OF ORYZIAS LUZONENSIS(Genetics,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- EITHER ORYZIAS LUZONENSIS Y OR O. CURVINOTUS Y INDUCES MALE DEVELOPMENT IN THEIR INTERSPECIFIC HYBRIDS(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- ORYZIAS LUZONENSIS HAS SEX-CHROMOSOMES THAT ARE NOT HOMOLOGOUS TO THE MEDAKA SEX-CHROMOSOMES(Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- 18pRA-9 湯川系における粘性係数の計算
- 27aYP-6 トカマクにおける高nバルーニングモードに対するトロイダル流の効果
- 22pXG-8 トカマクのMHD平衡に対するトロイダルシアー流の効果
- GONADAL DEVELOPMENT IN XY SEX-REVERSAL MUTANTS DERIVED FROM WILD POPULATIONS OF THE MEDAKA, ORYZIAS LATIPES(Genetics,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- MUTATIONS OF THE SEX-DETERMINING GENE DMY FROM WILD POPULATIONS OF THE MEDAKA, ORYZIAS LATIPES(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- ORIGIN OF DMY, A SEX-DETERMINING GENE OF THE MEDAKA, ORYZIAS LATIPES(Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- GENETIC ANALYSIS OF XY FEMALE FROM WILD POPULATIONS OF THE MEDAKA, OLYZIAS LATIPES(Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- DMY INDUCE MALE DEVELOPMENT IN XX TRANSGENIC MEDAKA FISH(Endocrinology &Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- Oryzias curvinotus Has DMY, a Gene That Is Required for Male Development in the Medaka, O. latipes(Developmental Biology)
- A STRAIN HAVING A ZZ/ZW SEX DETERMINATION SYSTEM DERIVED FROM A NATURALLY OCCURRING RECESSIVE MUTATION IN THE MEDAKA, ORYZIAS LATIPES(Genetics)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- MUTATIONS AFFECTING SEX DETERMINATION OR DIFFERENTIATION FROM WILD POPULATIONS OF THE MEDAKA, ORYZIAS LATIPES(Genetics)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- EXPRESSION OF DMY IN MEDAKA GONAD DURING EARLY TESTICULAR DEVELOPMENT(Developmental Biology)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- Construction of a BAC library derived from the inbred Hd-rR strain of the teleost fish, Oryzias latipes
- POSITIONAL CLONING OF A MAJOR HYBRID MALELESS LOCUS ON MEDAKA LINKAGE GROUP 17(Genetics,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- XY SEX REVERSAL CAUSED IN INTERSPECIFIC HYBRIDIZATION BETWEEN ORYZIAS LATIPES AND O. CURVINOTUS CORRELATES WITH VARIANT EXPRESSION OF DMY(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- THE LOCUS ON MEDAKA LINKAGE GROUP 17 CONTROLS XY SEX REVERSAL IN INTERSPECIFIC HYBRIDS BETWEEN ORYZIAS LATIPES AND O. CURVIOTUS(Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- 28aXH-6 二次元軸対称プロセスプラズマの流体シミュレーション
- Nonlinear Double Tearing Mode in Negative Shear Cylindrical Tokamaks
- EARLY DEVELOPMENT OF GONADS AND GENITAL DUCTS IN SECONDARY SEXUAL CHARACTER LESS MUTANT, SCL, OF THE MEDAKA(Endocrinology,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- DEVELOPMENT OF GONADS AND GENITAL DUCTS IN SECONDARY SEXUAL CHARACTER LESS MUTANT OF MEDAKA(Endocrinology)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- POSITIONAL CLONING OF THE SEX-DETERMINING REGION OF MEDAKA USING A Y CONGENIC STRAIN(Genetics)(Proceeding of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- HIGH TEMPERATURE TREATMENT DURING EMBRYONIC STAGE INDUCES XX SEX REVERSAL IN MEDAKA, ORYZIAS LATIPES(Developmental Biology,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- GENETIC ANALYSIS OF AN XY FEMALE MEDAKA DERIVED FROM SHIRONE, NIIGATA SUGGESTS AN AUTOSOMAL MODIFIER(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- GENETIC ANALYSIS OF A SECONDARY SEXUAL CHARACTER-LESS MUTANT, SCL, OF THE MEDAKA, ORYZIAS LATIPES(Endocrinology)(Proceedings of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- Mapping of the factor(s) controlling strain difference of estrogen-induced sex reversal rate in the medaka(Genetics)(Proceeding of the Seventy-Third Annual Meeting of the Zoological Society of Japan)
- APPEARANCE OF MALE MADAKA WITHOUT SECODARY SEXUAL CHARACTERS(Genetics)Proceedings of the Seventy-First Annual Meeting of the Zoological Society of Japan
- THE SEX DETERMINING GENE OF ORYZIAS MEKONGENSIS IS LOCATED ON A CHROMOSOME HOMOLOGOUS TO AN AUTOSOMAL REGION OF O. LATIPES(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- TESTIS DEVELOPMENT IN AN XX SEX-REVERSAL MUTANT DERIVED FROM A WILD MEDAKA POPULATION OF SHIRONE, NIIGATA PREFECTURE(Developmental Biology,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- The XX-XY Sex-determination System in Oryzias luzonensis and O. mekongensis Revealed by the Sex Ratio of the Progeny of Sex-reversed Fish(Genetics)
- Field Survey of Sex-Reversals in the Medaka, Oryzias latipes : Genotypic Sexing of Wild Populations(Genetics)
- MAPPING OF A FACTOR THAT CAUSES MALE SEX-REVERSAL OF XX MEDAKA(Genetics,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- ISOLATION OF A SEX-LINKED DNA MARKER FROM ORYZIAS JAVANICUS(Genetics,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- BOTH ZZ-ZW AND XX-XY SEX-DETERMINING MECHANISMS EXIST IN THE JAVANICUS GROUP OF THE ORYZIAS SPECIES(Developmental Biology,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
- ORYZIAS HUBBSI HAS A FEMALE-HETEROGAMETIC (ZZ/ZW) SEX-DETERMINING SYSTEM(Genetics,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- 27pA24P 抵抗性インターチェンジモードの非線形飽和と圧力分布の平坦化(プラズマ基礎・応用)
- 8aSS-1 簡約化MHDモデルによる新古典テアリングモードの解析((理論・数値解析),磁場閉じ込め,領域2)
- 27aWJ-9 非線形抵抗性壁モードによるポロイダル回転の減速機構(27aWJ 磁場閉じ込め(実験・理論),領域2(プラズマ物理・核融合,放電分野))
- 24pZB-2 非線形イオン温度勾配(ITG)モードにより生じるELM的な振舞い(24pZB プラズマ基礎・応用(波動・プラズマ源),領域2(プラズマ物理・核融合,放電分野))