Dielectric Properties of Zirconium Oxynitride Thin Films Deposited onto Silicon Substrates
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概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 2003-04-01
著者
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Saito Yoji
Department Of Electrical Engineering And Electronics Seikei University
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Saito Yoji
Department Of Anesthesiology School Of Medicine Shimane University
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TORII Masatoshi
Department of Electrical Engineering and Electronics, Seikei University
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Torii Masatoshi
Department Of Electrical Engineering And Electronics Seikei University
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