Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability

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概要

• 論文の詳細を見る

• Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.

• 社団法人電子情報通信学会の論文
• 1997-01-25

著者

• Nakata ShuJi

  Osaka University

• Lewiner Jacques

  Laboratoire D'electricite Generale E. S. P. C. I.

• Nakamura T

  Fujitsr Ltd. Akiruno-shi Jpn

• ICHIYA Mitsuo

  Matsushita Electric Works Ltd.

• NAKAMURA Takuro

  Matsushita Electric Works Ltd.

• Nakata S

  Graduate School Of Engineering Osaka University

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