Electrostatic Actuator with Electret

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概要

• 論文の詳細を見る

• In this paper, an electrostatic actuator with electret is proposed. Electrets are the electrical equivalent of magnets. They are dielectric's carrying a non equilibrium permanent space charge or polarization distribution. This distribution can create either an external electric field or internal properties such as piezo or pyroelectricity. In the first case it is possible to make new types of electrostatic actuators by the external electric field. An electrostatic relay with electret is fabricated to demonstrate the possibility of an electrostatic actuator with electret. The size of relay is 5.2 mm×11.5 mm. Its amature beam is 50μm thick, 2.9 mm wide, 6.3 mm long, and acts as a moving electrode. Facing it, the stationary electrode is 20μm away from the moving electrode. On the stationary electrode, new type of electret made from SiO_2 is deposited. We have succeeded in making the armature operate at low applied voltage 20 V. On the same structure without electret, we need more than 120 V to make the same armature operation. We have also succeeded in making the armature latching.

• 社団法人電子情報通信学会の論文
• 1995-02-25

著者

• Lewiner Jacques

  Laboratoire D'electricite Generale E. S. P. C. I.

• ICHIYA Mitsuo

  Matsushita Electric Works Ltd.

• Kasano Fumihiro

  Matsushita Electric Works Ltd.

• Nishimura Hiromi

  Matsushita Electric Works Ltd.

• Perino Didier

  hlp Technologies

• Nishimura H

  Matsushita Electronics Corp. Kyoto‐shi Jpn

関連論文

• Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
• The Long-Term Charge Storage Mechanism of Silicon Dioxide Electrets for Microsystems
• Electrostatic Actuator with Electret

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