The Long-Term Charge Storage Mechanism of Silicon Dioxide Electrets for Microsystems
スポンサーリンク
概要
- 論文の詳細を見る
In order to improve the sensitivity of micro-machined sensors applied with electrostatic fields and increase their actuated force of electrostatic micromachined actuators,"electrets," which are dielectrics carrying non equilibrjum permanent space charges or polarization distribution, are very important. In this paper, positively corona charged silicon dioxide electrets, which are deposited by Plasma Chemical Vapor Deposition (PCVD) and thermally oxidized, are investigated. Physical studies will be described, in which the charge stability is correlated to Thermally Stimulated Current (TSC) measurements and to Electron Spin Resonance (ESR) analysis. Some intrinsic differences have been observed between materials. The electrets with superior long-term charge stability contain 10,000 times as much E' center (・Si≡O_3) as the ones with inferior long-term charge stability. Finally, some investigations on the long-term charge storage mechanism of the positively charged silicon dioxide electret will be described.
- 社団法人電子情報通信学会の論文
- 1996-10-25
著者
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Lewiner Jacques
Laboratoire D'electricite Generale E. S. P. C. I.
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Nakamura T
Fujitsr Ltd. Akiruno-shi Jpn
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ICHIYA Mitsuo
Matsushita Electric Works Ltd.
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NAKAMURA Takuro
Matsushita Electric Works Ltd.
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NAKATAT Shuji
the Faculty of Engineering, Osaka University
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Nakata S
Graduate School Of Engineering Osaka University
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