A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure(Special Issue on Millimeter-Wave Circuits and Fabrication Technologies Opening up the 21st Century)

概要

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We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor(Q-factor)of more than 280 at 60GHz. We design low-loss filters and antennas built into silicon in a 60GHz band. A low-loss filter realizes an insertion loss of 1.0dB at 60GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.
社団法人電子情報通信学会の論文
2001-10-01