The Tepographical Selectivity in Pd-Activated Electroless Copper Deposition
スポンサーリンク
概要
- 論文の詳細を見る
We have investigated on the palladium activated electroless copper deposition and we found that the topographical selectivity of copper film growth could be controlled by the process conditions of palladium activation and post-treatment. It results the bottom-up first filling of copper in vias or trenches without any lithography or masking processes. Our experimental results reveal the details of the process mechanism involved in topographically selective electroless copper deposition.
- 社団法人電子情報通信学会の論文
- 2001-06-29
著者
-
Cho Sung
Department Of Urology Seoul National University Hospital
-
Oh Youn-jin
Department Of Chemical Engineering Sungkyunkwan University
-
Cho Sung
Department Of Chemical Engineering Sungkyunkwan University
-
Chung Chan-hwa
Department Of Chemical Engineering Sungkyunkwan University
-
Cho Sung
Department Of Anatomy Seoul National University College Of Medicine
関連論文
- Characterization of SiC:H films deposited using HMDS precursor with C_2H_2 dilution gas by remote PECVD system
- Serotonin-induced ion channel modulations in mesenteric artery myocytes from normotensive and DOCA-salt hypertensive rats
- Hydrogen Adsortion in Periodic Mesoporous Organic- and Inorganic-Silica Materials at Room Temperature
- Effect of amniotic membrane on induced expression of iNOS by exposure to stimulants in HaCaT cells
- ラット神経幹細胞の分化におけるギャップジャンクション細胞間コミュニケーション (GJIC) の役割 : p38 および ERK1/2 経路の関与(毒性学)
- O-2-63 Transgastric Endoscopic Cholecystectomy of the Porcine Model
- Effects of Hibarimicins and Hibarimicin-Related Compounds Produced by Microbispora on v-Src Kinase Activity and Growth and Differentiation of Human Myeloid Leukemia HL-60 Cells
- Coexistence of Behcet's Disease and Autoimmune Disease : Clinical Features of 11 Cases
- cDNA Cloning and Expression of an Aminoalcoholphosphotransferase Isoform in Chinese Cabbage
- Zincoaluminophosphate Molecular Sieves with AFI and ATS Topologies : Synthesis by Dry-Gel Conversion Methods and Their Catalytic Properties in the Isopropylation of Biphenyl
- The Topographical Selectivity in Pd-Activated Electroless Copper Deposition
- The Tepographical Selectivity in Pd-Activated Electroless Copper Deposition
- Effects of starvation on morphometric characteristics of olive flounder, Paralichthys olivaceus
- Rational Type of Laparoscopic Hysterectomy and Safety in Anesthetic Profiles
- Two Uterine Arterial Management Methods in Laparoscopic Hysterectomy
- Changes in Corneal Endothelial Cell Density in Patients with Normal-Tension Glaucoma
- Burn scars treated by pinhole method using a carbon dioxide laser
- An Acoustic Echo Cancellation Based on the Adaptive Lattice-Transversal Joint (LTJ) Filter Structure
- Expression of E- and N-cadherin and clinicopathology in hepatocellular carcinoma
- Subungual Extraskeletal Chondroma Mimicking Glomus Tumor
- Antioxidative Activity of Resveratrol and Its Derivatives Isolated from Seeds of Paeonia lactiflora(Organic Chemistry)
- Nuclear factor-κB dependency of doxorubicin sensitivity in gastric cancer cells is determined by manganese superoxide dismutase expression
- Chemical vapor infiltration (CVI) SiC whisker on carbon woven fabric for filter applications
- Various Patterns of Repigmentation after Narrowband UVB Monotherapy in Patients with Vitiligo
- Sequential Development of Herpes Zoster Duplex Unilateralis during Oral Famciclovir Treatment
- Synthesis of Phosphatidylserine in Carrot Cells Cultured under Carbon-Source Starvation
- A RFID EPC C1 Gen2 System with Channel Coding Capability in AWGN Noise Environments
- Study on lon-Exchange Behavior of Cu-CN Complexes
- Residual fraction as a parameter to predict bladder outlet obstruction in men with lower urinary tract symptoms
- Effects of Brimonidine 0.2%-Timolol 0.5% Fixed-Combination Therapy for Glaucoma
- Changes of precore nucleic acid sequence in chronic hepatitis B patients with and without interferon administration
- MC-27 AERODYNAMICALLY INDUCED POWER LOSS IN HARD DISK DRIVES
- Atomic Layer Etching of Si(100) at Room Temperature
- Atomic Layer Etching of Si(100) at Room Temperature
- Epigenetic methylation and expression of caspase 8 and survivin in hepatocellular carcinoma
- Simple Oblique Lumbar Magnetic Resonance Imaging Technique and its Diagnostic Value for Extraforaminal Disc Herniation
- Magnetic and Structural Phase Transitions of EuFe2As2 Studied via Neutron and Resonant X-ray Scattering
- Configuration Dependency of Attached Epoxy Groups on Graphene Oxide Reduction: A Molecular Dynamics Simulation
- Binding Evaluation of Targeted Microbubbles with Biotin–Avidin Interaction by Surface Plasmon Resonance Biosensor
- Oxygen Vacancy Chain Formation in TiO2 under External Strain for Resistive Switching Memory
- Water Trapping at the Graphene/Al
- Inverted Bottom-Emission Polymer Light-Emitting Devices Doped with Organic Salt
- Water Trapping at the Graphene/Al₂O₃ Interface (Special Issue : Microprocesses and Nanotechnology)
- Effect of Organic Salt Doping on Electron Injection in Single-Layer Polymer Light-Emitting Diodes
- Screen-Printed Polymer:Fullerene Bulk-Heterojunction Solar Cells
- A model for steam bubble formation at a submerged orifice in a flowing liquid.
- The proportion of uniparental disomy is increased in Prader-Willi syndrome due to an advanced maternal childbearing age in Korea