ICP発光分析法および二次イオン質量分析法によるセラミックスの分析に関する研究

概要

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The aim of this study is to establish the analytical methods for ceramics by inductively coupled plasma atomic emission spectrometry (ICP-AES) and secondary ion mass spectrometry (SIMS). For ICP-AES, the study focused on the procedure for sample decomposition into solution and the accurate measurement of impurities for practical samples. The combination of an acid decomposition technique using a PTFE vessel and calibration using matrix-matched solutions has been demonstrated to allow highly sensitive and multielemental determination of impurities in intractable ceramic powders with good accuracy. As for SIMS, emphasis was placed on the elimination of charge buildup in the analyses for insulating ceramic powders and sintered bodies. Two novel methods including the use of a metal disk for specimen mounting and the application of an extreme sample bias shift method have been developed. ICP-AES is convenient for accurate impurity analysis of ceramic powders, while SIMS is useful for the rapid analysis of both ceramic powders and sintered bodies.
社団法人日本分析化学会の論文
1994-05-05