有機分子の自己組織化ナノ構造を利用した2.5インチディスク状パターンドメディアの作製

概要

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Methods for preparation of patterned media were reviewed and a new one was introduced, Circumferential magnetic patterned media were prepared on a 2.5-inch-diameter glass plate by an artificially assisted (or aligned) self-assembling (AASA) method. A Ni master disk containing spiral patterns with 60- to 250-nm-wide lands and a 400-nm-wide groove was pressed into a resist film on a CoPt or CoCrPt film to transfer the spiral patterns. A diblock copolymer solution was cast into the grooves thus obtained, and then annealed to prepare self-assembling nano-dot structures aligned along the grooves, According to the dot patterns, the underlying magnetic films were patterned by ion milling to yield patterned media with a 40-nm diameter. The coercive forces and squareness ratios of the patterned media increased relative to those of continuous media. Single magnetic domains with an almost perpendicular orientation were confirmed in each magnetic dot.
社団法人日本磁気学会の論文
2003-03-01