高電気抵抗軟磁性グラニュラー膜の高周波特性

概要

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Highly electrical resistive soft magnetic Fe-Al-O granular films were prepared by RF magnetron sputtering. By measuring the frequency dependence of the initial permeability of these films, it was found that there was a relatively large deterioration of the initial permeability in films with a weak anisotropic field. Measurement of the frequency dependence of the resistivity of these films shwed that they have the same properties as films of pure metals such as Cu and Ti. This means that the large deterioration of the initial permeability is not caused by dielectric loss or by displacement current loss. The relationship between the damping constant and the anisotropic field was obtained both by fitting the frequency dependence of the initial permeability and by FMR, bur the results given by the two methods were very different. This difference is thought to be caused by the different resonance environments. The results of the investigation suggest that the high frequency loss may be connected with the exchange-coupling strength between the Fe grains in the granular films.
社団法人日本磁気学会の論文
1998-04-15