CZ育成LN単結晶の熱応力解析(<特集>バルク結晶の成長(II))

概要

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A three-dimensional finite element computer program for thermal stress analysis was developed for cracking of trigonal class 3m bulk single crystals such as lithium niobate (LN) during Czochralski growth. A tensor transformation technique was used to obtain an elastic constant matrix and a thermal expansion coefficient vector corresponding to an arbitrary pulling direction. The anisotropy of elastic constants and thermal expansion coefficients as well as their temperature dependence was considered in the program. Using this program. we analyzed thermal stress in a LN single crystal. The analyses were carried out, for the pulling directions of both the α-axis [100] and the c-axis[001]. The results show that thermal stress is lower in the c-axis pulling than in the a-axis pulling. The relation between thermal stress and the cracking and quality of a bulk single crystal was also discussed.
日本結晶成長学会の論文
1995-03-25