櫛形溝軸受面を有する静圧エアスライダの動特性

概要

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In this study we develop a new hydrostatic air bearing slider with comb-shaped grooves which can provide high damping ratio in the high-frequency region of resonance, as well as high stffness. The basic idea to increase the air film damping at a high frequency region is to reduce the compressive effect of the air film by a set of parallel inner grooves. Increases in groove number and groove depth generally result in high damping in the high-frequency region, but excessive increases cause negative damping in the low-frequency region. The design procedure to determine the optimal value of the groove parameters is described by the design charts based on numerical calculation. The developed air slider has a high static stiffness of 418 N/μm (non-dimensional stiffness is 0.59) in the vertical direction, Damping ratios are 0.19, 0.12 and 0.07 at the natural frequencies of the roll, pitch and vertical vibration modes, respectively.
社団法人日本機械学会の論文
1993-09-25