ワイヤロープ式シリコン単結晶引上げ装置の自励振動 : 第1報,自励振動の発生原因についての実験的考察

概要

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In order to minimize the height of Czochralski growing equipment for silicon single crystal. a wire rope winding method or a ball-chain winding method is used instead of a stiff shaft pulling a single crystal. When the wire rope or the ball-chain rotates, amplitudes of the whirling vibration gradually increase with time. and a self-excited vibration occurs. In this paper, the cause for this self-excited vibration is studied experimentally using a model of the wire-winding-type growing equipment for silicon single crystal. The self-excited vibration of a wire rope occurs when the rotation is above a resonant speed of the wire rope system, and then only the forward whirl of a wire rope becomes unstable independent of the direction of an initially added whirling. On the basis of the experimental results, it is clarified that self-excited vibrations of silicon single crystal growing equipment are due to an internal friction among element wires of the wire rope.
一般社団法人日本機械学会の論文
1988-11-25