フッ化チタン(IV)カリウムからの窒化チタンウイスカーの合成における添加物の効果

概要

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Titanium nitride (TiN) whiskers were formed on the outer surface of a graphite tube by heating potassium fluorotitanate (IV) (K_2TiF_6) above 1300℃ in a stream of nitrogen. It is found that the addition of reduced metals has remarkable effects on the deposition temperature, shape, and yield of TiN. By addition of calcium, aluminium, and silicon, TiN whiskers were formed at 1100-1400℃ on the outer surface of the graphite tube. By addition of magnesium, TiN whiskers were formed at 1200℃ on the outer surface of the graphite tube. When aluminium and silicon were added, TiN whiskers were formed on the surface of residual additive. It is speculated that the reduced metals accelerated the reduction of titanium fluoride. The shape of the whiskers was observed by SEM. The cross section of whiskers on the graphite tube was mostly square, and that of whiskers on residual additive was mostly octagonal. It was suggested that the whiskers with a square cross section formed on the graphite tube grew in the <100> direction, and those with an octagonal cross section obtained on residual additive grew in the <112> direction.
1996-08-01