プラズマ焼結法に関する研究

概要

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The main object of this study is to examine the sintering behavior of pure materials in low pressure plasmas. Here, Mo, Al_2O_3, and Si_3N_4 were chosen as examples of metallic, ionic, and covalent materials. The compacts were heated in a radio frequency inductively coupled plasma wader low pressure, N_2, H_2, Ar, and H_2 + Ar. The effects of the powder type and the plasma conditions were examined on the phase transition, the Microstructural change, the loss of weight, and the shrinkage. The Mo powder compact can be sintered to 94.5%, and Al_2O_3 of 0.1 μm powder can be sintered rapidly within 60 s to 96% of the theoretical density. Si_3N_4 was found to be very difficult to sinter macroscopically and no appreciable shrinkage took place at this stage. These experimental results show that the plasma-compact interaction plays an important role in the specimen heating.
社団法人日本セラミックス協会の論文
1988-03-01