異種材料間の加工段差

概要

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This paper presents experimental results on micro-steps between different materials or polished work surfaces composed of Al_2O_3-TiC (HV≒2 200), sputtered Al_2O_3 (HV≒990) and a magnetic material (HV≒180). The micro-steps, inevitably, are generated from the difference in the stock removal rates of the composite materials. In order to decrease micro-steps, use of a finer abrasive grain and a polishing plate of lower hardness such as tin is effective. Furthermore, cutting the grooves on the polishing plate is more effective in decreasing the micro-steps because abrasive grain can be buried easily in the surface of the polishing plate. In the case of a tin plate with the grooves, the micro-step between Al_2O_3-TiC and the magnetic material car be reduced to less than one half of that for a tin plate without grooves. This value can be brought to 10 nm and less.
公益社団法人精密工学会の論文
1993-04-05